Industry Solutions

Solutions for repair, cleaning, refurbishment and field support.

IMP

Ion Implantation Equipment Repair and Commissioning

Coverage for AMAT, VARIAN, SEN, AXCELIS and NISSIN 6/8/12 inch ion implantation platforms, including repair, refurbishment, parts and field commissioning.

THINFILM

Thin Film Equipment Refurbishment and Process Matching

For AMAT, MRC, LAM and NOVELLUS thin film platforms, covering full-tool refurbishment, process data matching and retrofit upgrades.

ETCH

Etch Tool Retrofit and Refurbishment

Supports AMAT and LAM etch tool refurbishment, including LAM ESC retrofit and Si/SiC product adaptation.

DIFF

Diffusion Furnace Refurbishment and Transfer Retrofit

Focused on TEL vertical furnace refurbishment and 6/8/12 inch wafer transfer system retrofit.

PARTS_CLEAN

Parts Clean Service

A traceable service workflow for semiconductor equipment parts cleaning, inspection, repair reporting and delivery.

REFURBISHMENT

Inventory Equipment Refurbishment and Field Commissioning

Inventory tools are hot-run tested, fast to deliver, customizable for customer process requirements and supported with field commissioning.