Pazi's ion implantation team has OEM experience and supports AMAT PI9500XR, XR80, XR200S, VISSTA HCP/1500H, Purion XE, VARIAN E220/500HP, Viista series, SEN-GSD series, Axcelis GSD series and NISSIN Exceed platforms. The team provides issue diagnosis, refurbishment, repair, parts supply and on-site commissioning.
IMP
Ion Implantation Equipment Repair and Commissioning
Coverage for AMAT, VARIAN, SEN, AXCELIS and NISSIN 6/8/12 inch ion implantation platforms, including repair, refurbishment, parts and field commissioning.