Semiconductor Service
Hangzhou PARTS Electronics Co., Ltd. was founded in 2013 and serves semiconductor wafer fabs up to 12 inches in China. The company covers ion implantation, thin film, etch and diffusion equipment sales and technical services. PARTS Electronics operates from the Qianjiang Cloud Valley industrial base in Xiaoshan, with around 5,000 sqm of owned facilities and around 3,000 sqm of cleanroom space. It has participated in more than 400 equipment sales and technical service projects. The company operates a semiconductor component processing facility in China, with localized parts manufacturing, component surface treatment and semiconductor component cleaning capabilities.
ISO 9001
Quality management
400+
Service projects
6 / 8 / 12 inch
Fab tool support
Field commissioning
Responsive onsite support
01
Focused support for core process tools and fab operations.
IMP
Coverage for AMAT, VARIAN, SEN, AXCELIS and NISSIN 6/8/12 inch ion implantation platforms, including repair, refurbishment, parts and field commissioning.
THINFILM
For AMAT, MRC, LAM and NOVELLUS thin film platforms, covering full-tool refurbishment, process data matching and retrofit upgrades.
ETCH
Supports AMAT and LAM etch tool refurbishment, including LAM ESC retrofit and Si/SiC product adaptation.
DIFF
Focused on TEL vertical furnace refurbishment and 6/8/12 inch wafer transfer system retrofit.
PARTS_CLEAN
A traceable service workflow for semiconductor equipment parts cleaning, inspection, repair reporting and delivery.
REFURBISHMENT
Inventory tools are hot-run tested, fast to deliver, customizable for customer process requirements and supported with field commissioning.
02
Images, reports and details require contact submission and approval.
Request Catalog AccessAccess Workflow
Quick Contact
Submit your contact details and requirement first. After approval, private product images, repair reports and detailed files become available.
余威
13587265402
Product access, repair inquiry and inventory quotation
