The thin film team supports AMAT Precision5000, CENTURA 5200 Ultima/HDP, Endura 5500/Endura 2, Producer SE/GT/XP, MRC 3190/3290, LAM Vector and LAM C1/C2/C3 tools. Services cover refurbishment, process data matching and commissioning.
THINFILM
Thin Film Equipment Refurbishment and Process Matching
For AMAT, MRC, LAM and NOVELLUS thin film platforms, covering full-tool refurbishment, process data matching and retrofit upgrades.