The etch team supports AMAT Precision5000, Centura 5200, LAM4520, LAM4500, LAM4400, TCP9600, TCP9400, LAM2300 Kiyo/Kiyo45 and E5/E6 Kiyo platforms. Services include ESC retrofit, Si/SiC adaptation and full-tool refurbishment.
ETCH
Etch Tool Retrofit and Refurbishment
Supports AMAT and LAM etch tool refurbishment, including LAM ESC retrofit and Si/SiC product adaptation.